In-situ determination of the spring constant of AFM cantilevers using a MEMS nanoforce transducer
Gao S., Brand U., Li Z.Atomic force microscope (AFM), Cantilever calibration, Nano-force transducer
Document type | Proceedings |
Journal title / Source | Proceedings of the 14th international conference of the european society for precision engineering and nanotechnology |
Volume | I |
Page numbers / Article number | P4.11, 205V1 |
Publisher's name | Sieca Repro |
Publisher's address (city only) | Delft |
Publication date | 2015 |
Conference name | 14th international conference of the european society for precision engineering and nanotechnology |
Conference date | June 2-6, 2014 |
Conference place | Dubrovnik, Croatia |
ISBN | 14: 978 - 0 - 9566790 - 3 - 1 |
Language | English |