In-situ determination of the spring constant of AFM cantilevers using a MEMS nanoforce transducer

Gao S., Brand U., Li Z.
Keywords:

Atomic force microscope (AFM), Cantilever calibration, Nano-force transducer

Document type Proceedings
Journal title / Source Proceedings of the 14th international conference of the european society for precision engineering and nanotechnology
Volume I
Page numbers / Article number P4.11, 205V1
Publisher's name Sieca Repro
Publisher's address (city only) Delft
Publication date 2015
Conference name 14th international conference of the european society for precision engineering and nanotechnology
Conference date June 2-6, 2014
Conference place Dubrovnik, Croatia
ISBN 14: 978 - 0 - 9566790 - 3 - 1
Language English

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