In-situ characterisation of the probing force of contact stylus profilers using a micromachined nanoforce actuator
Li ZL, Ahbe TA, Gao SG, Brand UB| Document type | Proceedings |
| Journal title / Source | Proceedings of the 12th euspen International Conference |
| Peer-reviewed article | 1 |
| Volume | 1 |
| Issue | International Conference European Society for Precision Engineering and Nanotechnology 12th |
| Page numbers / Article number | 179-182 |
| Publisher's name | Euspen conference proceedings |
| Publisher's address (city only) | Leuven, Belgium |
| Publication date | 2012-6 |
| Conference name | 12th International Conference European Society for Precision Engineering and Nanotechnology |
| Conference date | 04-06-2012 to 08-06-2012 |
| Conference place | Nacka Strandsmässan, Stockholm, Sweden |
| Web URL | http://training.euspen.eu/content/News-and-events/euspen-events/Stockholm%202012/proceedings/VolumePro1/VolumePro1/HTML/files/assets/basic-html/page179.html |
| Language | English |