IMPROVEMENT IN LONG TERM STABILITY OF THE LONG RANGE AFMS

Vorbringer-Dorozhovets N., Manske E.
Keywords:

AFM, long range AFM, nanopositioning and nanomeasuring machine, NPM machine, long distance measurements

Document type Proceedings
Journal title / Source XXI IMEKO World Congress - Full Papers
Issue 1
Page numbers / Article number 2279
Publisher's name Czech Technical University
Publisher's address (city only) Prague
Publication date 2015
Conference name XXI IMEKO World Congress
Conference date August 30 - September 4, 2015
Conference place Prague
ISBN 978-80-01-05793-3
Language English

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