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Influence of ion induced secondary electron emission on the stability of ionisation vacuum gauges

Illgen C., Jousten K., Teodoro O.M.N.D., Bundaleski N., Figueiredo I.

Ion induced secondary electron emissionIonisation vacuum gaugesXPS

Document type Article
Journal title / Source Vacuum
Page numbers / Article number 109907
Publisher's name Elsevier BV
Publication date 2020-11
ISSN 0042-207X
DOI 10.1016/j.vacuum.2020.109907
Language English

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Project title (JRP)
16NRM05: Ion Gauge: Towards a documentary standard for an ionisation vacuum gauge
Name of Call / Funding Programme
EMPIR 2016: Pre-Co-Normative