Scatterometer for characterization of diffractive optical elements
Husu H., Saastamoinen T., Laukkanen J., Siitonen S., Turunen J., Lassila A.Diffraction gratings, metrology, nanoscale materials and structures
| Document type | Article |
| Journal title / Source | Measurement Science and Technology |
| Volume | 25 |
| Publication date | 2014-3-5 |
| DOI | 10.1088/0957-0233/25/4/044019 |
| Web URL | http://iopscience.iop.org/0957-0233/25/4/044019/article?fromSearchPage=true |