hp-finite element method for simulating light scattering from complex 3D structures
Burger S., Zschiedrich L., Pomplun J., Herrmann S., Schmidt F.Scatterometry, optical metrology, computational metrology, computational lithography, 3D rigorous electromagnetic field simulations, finite-element methods, hp-FEM
| Document type | Proceedings |
| Journal title / Source | Proc SPIE |
| Peer-reviewed article | 1 |
| Volume | 9424 |
| Publication date | 2015 |
| Conference name | Metrology, Inspection, and Process Control for Microlithography XXIX |
| Conference date | February 22, 2015 |
| Conference place | San Jose, California, United States |
| DOI | 10.1117/12.2085795 |
| Language | English |