Homogeneity Characterization of Lattice Spacing of Silicon Single Crystals

Waseda A. W., Fujimoto H. F., Zhang X. Z., Kuramoto N. K., Fujii K. F.
Keywords:

Avogadro constant, impurity, lattice comparator, lattice spacing, silicon single crystal

Document type Article
Journal title / Source IEEE Transaction on Instrumentation and Measurement
Peer-reviewed article 1
Volume 64
Issue 6
Page numbers / Article number 1692-1695
Publisher's name Institution of Electrical and Electrical Engineering (IEEE)
Publisher's address (city only) Piscataway
Publication date 2015-1-17
ISSN 0018-9456
DOI 10.1109/TIM.2014.2383091
Web URL http://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=7004030&refinements%3D4294557292%26filter%3DAND%28p_IS_Number%3A7104190%29
Language English
Persistent Identifier INSPEC Accession Number: 15111465

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