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Fabrication and Measurements of Inductive Devices for Scanning Microwave Microscopy

Hoffmann, J., Vasyukov, D., Quang, T. L., Ziade, F. (Laboratoire National de Métrologie et d’Essais, Trappes, France) and Buchter, A.
Keywords:

calibration, doping profiles, inductors, scanning probe microscopy, silicon compounds

Document typeProceeding
Journal title / Source2019 IEEE 19th International Conference on Nanotechnology (IEEE-NANO)
Volume2019
Issue-
Page numbers / Article number1-4
Publisher's nameIEEE
Publication date 2019-07
Conference nameIEEE Nano
Conference date22-07-2019 to 26-07-2019
Conference placeMacao
ISSNElectronic ISSN: 1944-9380 Pri
ISBNElectronic ISBN: 978-1-7281-28
Web URLhttps://zenodo.org/record/4275929
LanguageEnglish
Persistent Identifierhttps://zenodo.org/record/4275929

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