Fabrication and Measurements of Inductive Devices for Scanning Microwave Microscopy
Hoffmann J., Vasyukov D., Quang T. L., Ziade F., Buchter A.calibration, doping profiles, inductors, scanning probe microscopy, silicon compounds
Document type | Proceedings |
Journal title / Source | 2019 IEEE 19th International Conference on Nanotechnology (IEEE-NANO) |
Volume | 2019 |
Issue | - |
Page numbers / Article number | 1-4 |
Publisher's name | IEEE |
Publication date | 2019-7 |
Conference name | IEEE Nano |
Conference date | 22-07-2019 to 26-07-2019 |
Conference place | Macao |
ISSN | Electronic ISSN: 1944-9380 Pri |
ISBN | Electronic ISBN: 978-1-7281-28 |
Web URL | https://zenodo.org/record/4275929 |
Language | English |
Persistent Identifier | https://zenodo.org/record/4275929 |