Fabrication and Measurements of Inductive Devices for Scanning Microwave Microscopy
Hoffmann J., Vasyukov D., Quang T. L., Ziade F., Buchter A.calibration, doping profiles, inductors, scanning probe microscopy, silicon compounds
| Document type | Proceedings |
| Journal title / Source | 2019 IEEE 19th International Conference on Nanotechnology (IEEE-NANO) |
| Volume | 2019 |
| Issue | - |
| Page numbers / Article number | 1-4 |
| Publisher's name | IEEE |
| Publication date | 2019-7 |
| Conference name | IEEE Nano |
| Conference date | 22-07-2019 to 26-07-2019 |
| Conference place | Macao |
| ISSN | Electronic ISSN: 1944-9380 Pri |
| ISBN | Electronic ISBN: 978-1-7281-28 |
| Web URL | https://zenodo.org/record/4275929 |
| Language | English |
| Persistent Identifier | https://zenodo.org/record/4275929 |