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Fabrication and Measurements of Inductive Devices for Scanning Microwave Microscopy

Hoffmann J., Vasyukov D., Quang T. L., Ziade F., Buchter A.
Keywords:

calibration, doping profiles, inductors, scanning probe microscopy, silicon compounds

Document type Proceedings
Journal title / Source 2019 IEEE 19th International Conference on Nanotechnology (IEEE-NANO)
Volume 2019
Issue -
Page numbers / Article number 1-4
Publisher's name IEEE
Publication date 2019-7
Conference name IEEE Nano
Conference date 22-07-2019 to 26-07-2019
Conference place Macao
ISSN Electronic ISSN: 1944-9380 Pri
ISBN Electronic ISBN: 978-1-7281-28
Web URL https://zenodo.org/record/4275929
Language English
Persistent Identifier https://zenodo.org/record/4275929

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Information

Project title (JRP)
16ENG06: ADVENT: Metrology for advanced energy-saving technology in next-generation electronics applications
Name of Call / Funding Programme
EMPIR 2016: Energy