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Analysis of Mesoporous Iridium Oxide Thin Films by the Combined Methodical Approach SEM/EDS/STRATAGem

Sachse R., Hertwig A., Kraehnert R., Hodoroaba V.D.

Electron probe microanalysis (EPMA); Iridium oxide; Porous thin films; Spectroscopic ellipsometry

Document type Proceedings
Journal title / Source Proceedings of Microscopy & Microanalysis 2018
Volume 24
Page numbers / Article number 762-763
Publisher's name Cambridge University Press (CUP)
Publication date 2018-8
Conference name Microscopy & Microanalysis 2018
Conference date 05-08-2018 to 09-08-2018
Conference place Baltimore, Maryland, USA
ISSN 1431-9276, 1435-8115
DOI 10.1017/S1431927618004300
Language English

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Project title (JRP)
16ENG03: HyMet: Hybrid metrology for thin films in energy applications
Name of Call / Funding Programme
EMPIR 2016: Energy