High precision tilt stage as a key element to a universal test mirror for characterization and calibration of slope measuring instruments
Yashchuk VV, Artemiev NA, Centers G, Chaubard A, Geckeler RD, Lacey I, Marth H, McKinney WR, Noll T, Siewert F, Winter M, Zeschke TCalibration, Mirrors, X-ray optics, Apertures, Comparators
| Document type | Article |
| Journal title / Source | REVIEW OF SCIENTIFIC INSTRUMENTS |
| Peer-reviewed article | 1 |
| Volume | 87 |
| Issue | 051904 (2016) |
| Page numbers / Article number | 1-12 |
| Publisher's name | American Institute of Physics |
| Publisher's address (city only) | Melville, NY 11747-4300 USA |
| Publication date | 2016-5-20 |
| ISSN | Print: 0034-6748, Online: 1089-7623 |
| DOI | 10.1063/1.4950729 |
| Web URL | http://aip.scitation.org/doi/10.1063/1.4950729 |
| Language | English |