High precision tilt stage as a key element to a universal test mirror for characterization and calibration of slope measuring instruments

Yashchuk VV, Artemiev NA, Centers G, Chaubard A, Geckeler RD, Lacey I, Marth H, McKinney WR, Noll T, Siewert F, Winter M, Zeschke T
Keywords:

Calibration, Mirrors, X-ray optics, Apertures, Comparators

Document type Article
Journal title / Source REVIEW OF SCIENTIFIC INSTRUMENTS
Peer-reviewed article 1
Volume 87
Issue 051904 (2016)
Page numbers / Article number 1-12
Publisher's name American Institute of Physics
Publisher's address (city only) Melville, NY 11747-4300 USA
Publication date 2016-5-20
ISSN Print: 0034-6748, Online: 1089-7623
DOI 10.1063/1.4950729
Web URL http://aip.scitation.org/doi/10.1063/1.4950729
Language English

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