High precision dimensional metrology of periodic nanostructures using laser scatterometry
Bodermann Bernd, Bonifer Stefanie, Buhr Egbert, Diener Alexander, Wurm Matthias| Document type | Proceedings |
| Journal title / Source | |
| Publication date | 2015 |
| Conference name | 10th IMEKO Symposium Laser Metrology for Precision Measurement and Inspection in Industry |
| Conference date | 12 - 13 September 2011 |
| Conference place | Braunschweig, Germany |
| ISBN | 978-3-18-092156-3 |
| Language | English |