Correction for lateral distortion in coherence scanning interferometry
Henning Andrew, Giusca Claudiu, Forbes Alistair B, Smith Ian, Leach Richard, Coupland Jeremy, Mandal RahulSurface analysis, Measurement, Distortion correction
| Document type | Article |
| Journal title / Source | CIRP Annals Manufacturing Technology |
| Volume | 62 |
| Issue | 1 |
| Page numbers / Article number | 547 to 550 |
| Publication date | 2013 |
| DOI | 10.1016/j.cirp.2013.03.026 |
| Web URL | http://www.sciencedirect.com/science/article/pii/S0007850613000279 |