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Traceable Coplanar Waveguide Calibrations on Fused Silica Substrates up to 110 GHz

Arz, U. (PTB, Braunschweig, Germany), Kuhlmann, K. (PTB, Braunschweig, Germany), Dziomba, T. (Physikalisch-Technische Bundesanstalt, Braunschweig, Germany), Hechtfischer, G., Phung, G., Schmückle, F. and Heinrich, W.
Keywords:

Calibration, on-wafer, S-parameters, traceability, uncertainty budget

Document typeArticle
Journal title / SourceIEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES
Volumet.b.d.
Page numbers / Article number1-10
Publisher's nameIEEE
Publication date 2018-04-19
DOI10.1109/TMTT.2019.2908857
Web URLhttps://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=8693763
LanguageEnglish

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