Influence of Microwave Probes on Calibrated On-Wafer Measurements

Phung G.N., Schmuckle F.J., Doerner R. , Kahne B., Fritzsch T., Arz U., Heinrich W.

Calibration, coplanar waveguide, electromagnetic field simulation, multiline-thru-reflect-line, on-wafer probing, probes

Document type Article
Journal title / Source IEEE Transactions on Microwave Theory and Techniques
Volume 67
Issue 5
Page numbers / Article number 1892-1900
Publisher's name Institute of Electrical and Electronics Engineers (IEEE)
Publication date 2019-5
ISSN 0018-9480, 1557-9670
DOI 10.1109/TMTT.2019.2903400
Language English

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