Influence of Microwave Probes on Calibrated On-Wafer Measurements
Phung G.N., Schmuckle F.J., Doerner R. , Kahne B., Fritzsch T., Arz U., Heinrich W.Calibration, coplanar waveguide, electromagnetic field simulation, multiline-thru-reflect-line, on-wafer probing, probes
Document type | Article |
Journal title / Source | IEEE Transactions on Microwave Theory and Techniques |
Volume | 67 |
Issue | 5 |
Page numbers / Article number | 1892-1900 |
Publisher's name | Institute of Electrical and Electronics Engineers (IEEE) |
Publication date | 2019-5 |
ISSN | 0018-9480, 1557-9670 |
DOI | 10.1109/TMTT.2019.2903400 |
Web URL | https://www.fbh-berlin.de/fileadmin/downloads/Publications/2019/FINAL_VERSION_repository.pdf |
Language | English |