In situ calibration of numerical aperture in optical microscopes

Hansen Poul Erik , Siaudinyté Lauryna, Siefke Thomas

Microscopy, Numerical aperture, uncertainty, back focal plane, Scatterometry, Industry, Innovation and Infrastructure

Document type Proceedings
Journal title / Source 19 th IMEKO TC10 Conference
Volume MACRO meet
Page numbers / Article number 108-112
Publisher's name International Measurement Confederation (IMEKO)
Publisher's address (city only) Budapest
Publication date 2023-12
Conference name MACRO meets NANO in Measurement for Diagnostics, Optimization and Control
Conference date 21-09-2023 to 22-09-2023
Conference place Delft
ISBN 9781713884125
Language English
Persistent Identifier 9781713884125

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