In situ calibration of numerical aperture in optical microscopes
Hansen Poul Erik , Siaudinyté Lauryna, Siefke ThomasMicroscopy, Numerical aperture, uncertainty, back focal plane, Scatterometry, Industry, Innovation and Infrastructure
| Document type | Proceedings |
| Journal title / Source | 19 th IMEKO TC10 Conference |
| Volume | MACRO meet |
| Page numbers / Article number | 108-112 |
| Publisher's name | International Measurement Confederation (IMEKO) |
| Publisher's address (city only) | Budapest |
| Publication date | 2023-12 |
| Conference name | MACRO meets NANO in Measurement for Diagnostics, Optimization and Control |
| Conference date | 21-09-2023 to 22-09-2023 |
| Conference place | Delft |
| ISBN | 9781713884125 |
| Web URL | https://www.imeko.org/index.php/proceedings/9144-in-situ-calibration-of-numerical-aperture-in-optical-microscopes |
| Language | English |
| Persistent Identifier | 9781713884125 |