Imaging scatterometry for flexible measurements of patterned areas
Hansen P.R., Madsen M.H.Imaging scatterometry flexible measurements patterned areas
| Document type | Article |
| Journal title / Source | Optics Express |
| Volume | 24 |
| Issue | 2 |
| Page numbers / Article number | 1109 |
| Publisher's name | The Optical Society |
| Publication date | 2016-1-13 |
| ISSN | 1094-4087 |
| DOI | 10.1364/OE.24.001109 |
| Language | English |