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Imaging scatterometry for flexible measurements of patterned areas

Hansen P.R., Madsen M.H.

Imaging scatterometry flexible measurements patterned areas

Document type Article
Journal title / Source Optics Express
Volume 24
Issue 2
Page numbers / Article number 1109
Publisher's name The Optical Society
Publication date 2016-1-13
ISSN 1094-4087
DOI 10.1364/OE.24.001109
Language English

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Project title (JRP)
ENG53: ThinErgy: Traceable characterisation of thin-film materials for energy applications
Name of Call / Funding Programme
EMRP A169: Call 2013 Energy II