Enhanced Measurement Accuracy for Nanostructures Using Hybrid Metrology

Hansen P-E., Johannsen S.R., Jensen S.A., Hansen P.

metrology, Mueller ellipsometry, inverse modelling, scatterometry, nanostructures

Document type Article
Journal title / Source Frontiers in Physics
Volume 9
Page numbers / Article number 791459
Publisher's name Frontiers Media SA
Publication date 2022-1-19
ISSN 2296-424X
DOI 10.3389/fphy.2021.791459
Web URL https://www.frontiersin.org/articles/10.3389/fphy.2021.791459/full
Language English

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