Forward simulation of coherent beams on grating structures for coherent scatterometry
Hammerschmidt M., Zschiedrich L., Siaudinyté L., Manley P., Schneider P.I, Burger S.finite element method, coherent scatterometry, Gaussian beam, focused illumination, periodic structures, Floquet transformation
| Document type | Proceedings |
| Journal title / Source | Proc. SPIE |
| Volume | PC12619 |
| Page numbers / Article number | PC1261907 |
| Publication date | 2023 |
| Conference name | Modeling Aspects in Optical Metrology IX |
| Conference date | 26-06-2023 to 30-06-2023 |
| Conference place | Munich, Germany |
| DOI | 10.1117/12.2673231 |
| Web URL | https://arxiv.org/abs/2309.06109 |
| Language | English |