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On-Wafer Series-Through Broadband Measurement of Sub-fF55-nm MOS RF Voltage-Tunable Capacitors

Daffé, K. (IEMN-Univ-Lille1, France), Dambrine, G. (IEMN-Univ-Lille1, France), Durand, C., Gaquiere, C. and Haddadi, K. (IEMN-Univ-Lille1, France)
Keywords:

Microwave, on-wafer, S-parameters, capacitor, uncertainty

Document typeArticle
Journal title / SourceIEEE Microwave and Wireless Components Letters
Volume28
Issue9
Page numbers / Article number831-833
Publisher's nameInstitute of Electrical and Electronics Engineers (IEEE)
Publisher's address (city only)445 Hoes Lane Piscataway NJ 08855-1331 United States
Publication date 2018-09
ISSN1531-1309, 1558-1764
DOI10.1109/LMWC.2018.2851386
Web URLhttps://hal.archives-ouvertes.fr/hal-01873048
LanguageEnglish

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