On-Wafer Series-Through Broadband Measurement of Sub-fF55-nm MOS RF Voltage-Tunable Capacitors

Daffé K., Dambrine G., Durand C., Gaquiere C., Haddadi K.

Microwave, on-wafer, S-parameters, capacitor, uncertainty

Document type Article
Journal title / Source IEEE Microwave and Wireless Components Letters
Volume 28
Issue 9
Page numbers / Article number 831-833
Publisher's name Institute of Electrical and Electronics Engineers (IEEE)
Publisher's address (city only) 445 Hoes Lane Piscataway NJ 08855-1331 United States
Publication date 2018-9
ISSN 1531-1309, 1558-1764
DOI 10.1109/LMWC.2018.2851386
Web URL https://hal.archives-ouvertes.fr/hal-01873048
Language English

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