Nano-probing station incorporating MEMS probes for 1D device RF on-wafer characterization
Daffé K., Marzouk J., Fellahi A. El, Xu T., Boyaval C., Eliet S., Grandidier B., Arscott S., Dambrine G., Haddadi K.MEMS GSG Probe, nano-prober, Nanowire, on-wafer, microwave
| Document type | Proceedings |
| Journal title / Source | 2017 47th European Microwave Conference (EuMC) |
| Publisher's name | IEEE |
| Publication date | 2017-10 |
| Conference name | EuMC |
| Conference date | 08-10-2017 to 12-10-2017 |
| Conference place | Nuremberg |
| DOI | 10.23919/EuMC.2017.8230973 |
| Web URL | https://hal.archives-ouvertes.fr/hal-01726555 |
| Language | English |