Good practice guide for the measurement of the cantilever normal spring constant using a MEMS device
Gao S.MEMS, AFM-cantilever
| Document type | Good Practice Guide |
| Journal title / Source | |
| Publication date | 2015-10-14 |
| Web URL | http://www.ptb.de/emrp/resources/documents/tmompon/2015_Gao_Guide_CantiCali_MEMS.pdf |
| Language | English |