Good Practice Guide “Elastic property measurement of nanobeams by cantilever force measurement inside a Scanning Electron Microscope”
Wollschläger N., Österle W.Cantilever, SEM
| Document type | Good Practice Guide |
| Journal title / Source | |
| Issue | 2015 |
| Publication date | 2015-11 |
| Web URL | http://www.ptb.de/emrp/2618.html |
| Language | English |