Good Practice Guide “Elastic property measurement of nanobeams by cantilever force measurement inside a Scanning Electron Microscope”
Wollschläger N., Österle W.Cantilever, SEM
Document type | Good Practice Guide |
Journal title / Source | |
Issue | 2015 |
Publication date | 2015-11 |
Web URL | http://www.ptb.de/emrp/2618.html |
Language | English |