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Good Practice Guide “Elastic property measurement of nanobeams by cantilever force measurement inside a Scanning Electron Microscope”

Wollschläger N., Österle W.
Keywords:

Cantilever, SEM

Document type Good Practice Guide
Journal title / Source
Issue 2015
Publication date 2015-11
Web URL http://www.ptb.de/emrp/2618.html
Language English

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Information

Project title (JRP)
NEW05: MechProNO: Traceable measurement of mechanical properties of nano-objects
Name of Call / Funding Programme
EMRP A169: Call 2011 Metrology for New Technologies