Neural Network Approach for Modelling and Compensation of Local Surface-Tilting-Dependent Topography Measurement Errors in Coherence Scanning Interferometry
Gao S., Li Z., Brand U.coherence scanning interferometry, scanning white light interferometry, surface topography measurement, artificial intelligence, neural network, systematic deviation compensation
| Document type | Article |
| Journal title / Source | Metrology |
| Volume | 4 |
| Issue | 3 |
| Page numbers / Article number | 446-456 |
| Publisher's name | MDPI AG |
| Publisher's address (city only) | Basel, Switzerland |
| Publication date | 2024-9 |
| ISSN | 2673-8244 |
| DOI | 10.3390/metrology4030027 |
| Language | English |