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Towards traceable mechanical properties measurement of silicon nanopillars using contact resonance force microscopy

Gao S., Brand U.

Microscopy, silicon, calibration, nanofibers, nanoparticles

Document type Proceedings
Journal title / Source Optical Micro- and Nanometrology V
Volume 9132D
Publication date 2014-5-1
Conference name SPIE Photonics Europe 2014
Conference date April 14-17, 2014
Conference place Brussels, Belgium
DOI 10.1117/12.2052475

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Project title (JRP)
NEW05: MechProNO: Traceable measurement of mechanical properties of nano-objects
Name of Call / Funding Programme
EMRP A169: Call 2011 Metrology for New Technologies