Towards traceable mechanical properties measurement of silicon nanopillars using contact resonance force microscopy
Gao S., Brand U.Microscopy, silicon, calibration, nanofibers, nanoparticles
| Document type | Proceedings |
| Journal title / Source | Optical Micro- and Nanometrology V |
| Volume | 9132D |
| Publication date | 2014-5-1 |
| Conference name | SPIE Photonics Europe 2014 |
| Conference date | April 14-17, 2014 |
| Conference place | Brussels, Belgium |
| DOI | 10.1117/12.2052475 |