Towards traceable mechanical properties measurement of silicon nanopillars using contact resonance force microscopy
Gao S., Brand U.Microscopy, silicon, calibration, nanofibers, nanoparticles
Document type | Proceedings |
Journal title / Source | Optical Micro- and Nanometrology V |
Volume | 9132D |
Publication date | 2014-5-1 |
Conference name | SPIE Photonics Europe 2014 |
Conference date | April 14-17, 2014 |
Conference place | Brussels, Belgium |
DOI | 10.1117/12.2052475 |