In-situ nondestructive characterization of the normal spring constant of AFM cantilevers
Gao Sai, Brand Uwedynamic reference spring (DRS), MOEMS nano-force transducer, normal spring constant, stiffness, AFM cantilever
| Document type | Article |
| Journal title / Source | Measurement Science and Technology |
| Volume | 25 |
| Issue | 044014 |
| Publication date | 2014-3-5 |
| DOI | 10.1088/0957-0233/25/4/044014 |
| Web URL | http://iopscience.iop.org/0957-0233/25/4/044014/article |