Efficient surface passivation of germanium nanostructures with 1% reflectance
Fung T.H, Isometsä J., Lehtiö J.P, Pasanen T.P, Liu H., Leiviskä O., Laukkanen P., Savin H., Vähänissi V.ICP-RIE, nanostructured Ge surfaces, surface passivation, SRV, optoelectronics
| Document type | Article |
| Journal title / Source | Nanotechnology |
| Volume | 34 |
| Issue | 35 |
| Page numbers / Article number | 355201 |
| Publisher's name | IOP Publishing |
| Publisher's address (city only) | Bristol, United Kingdom |
| Publication date | 2023-6-13 |
| ISSN | 0957-4484, 1361-6528 |
| DOI | 10.1088/1361-6528/acd25b |
| Language | English |