Fourier ellipsometry – an ellipsometric approach to Fourier scatterometry
Petrik P., Kumar N., Fried M., Fodor B., Juhasz G., Pereira S.E., Burger S., Urbach H. P.Optical metrology, ellipsometry, scatterometry, RCWA, Fourier scatterometry, sensitivity
| Document type | Article |
| Journal title / Source | JEOS |
| Peer-reviewed article | 1 |
| Volume | 10 |
| Publication date | 2015 |
| ISSN | 1990-2573 |
| DOI | 10.2971/jeos.2015.15002 |
| Language | English |