A microscopy approach for in situ inspection of micro-coordinate measurement machine styli for contamination
Feng X., Pascal J.µCMM, stylus inspection, contamination, microscopy, focus stacking
| Document type | Article |
| Journal title / Source | Measurement Science and Technology |
| Volume | 28 |
| Issue | 9 |
| Page numbers / Article number | 095010 |
| Publisher's name | IOP Publishing |
| Publication date | 2017-8-21 |
| ISSN | 0957-0233, 1361-6501 |
| DOI | 10.1088/1361-6501/aa7c93 |
| Language | English |