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Water vapor concentration measurements in high purity gases by means of comb assisted cavity ring down spectroscopy

Fasci E,, Khan M. A, D’Agostino V., Gravina S., Fernicola V., Gianfrani L., Castrillo A.
Keywords:

Cavity ring-down spectroscopy; High-sensitivity; Water mole fraction; Optical frequency comb synthesizer; Part per trillion

Document type Article
Journal title / Source Sensors and Actuators A: Physical
Volume 362
Issue 1 November
Page numbers / Article number 114632
Publisher's name Elsevier BV
Publisher's address (city only) Amsterdam, NX, Netherlands
Publication date 2023-9
ISSN 0924-4247
DOI 10.1016/j.sna.2023.114632
Language English

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Information

Project title (JRP)
20IND06: PROMETH2O: Metrology for trace water in ultra-pure process gases
Name of Call / Funding Programme
EMPIR 2020: Industry