On the characterization of ultra-precise X-ray optical components: advances and challenges inex situmetrology
Falkenberg G., Störmer M., Zeschke T., Buchheim J., Siewert F., Sankari R.synchrotron optics; X-ray optics; metrology for synchrotron optics; slope measurement; NOM; multilayer; focusing mirrors
Document type | Article |
Journal title / Source | Journal of Synchrotron Radiation |
Volume | 21 |
Issue | 5 |
Page numbers / Article number | 968-975 |
Publisher's name | International Union of Crystallography (IUCr) |
Publication date | 2014-8-27 |
ISSN | 1600-5775 |
DOI | 10.1107/S1600577514016221 |
Language | English |