Damped Cantilever Microprobes for High-Speed Contact Metrology with 3D Surface Topography
Fahrbach M., Xu M., Nyang’au W., Domanov O., Schwalb C., Li Z., Kuhlmann C., Brand U., Peiner E.piezoresistive cantilever, tactile surface scanning, high-throughput metrology, contact mode, resonance frequency, quality factor
| Document type | Article |
| Journal title / Source | Sensors |
| Volume | 23 |
| Issue | 4 |
| Page numbers / Article number | 2003 |
| Publisher's name | MDPI AG |
| Publisher's address (city only) | Basel, Switzerland |
| Publication date | 2023-2-10 |
| ISSN | 1424-8220 |
| DOI | 10.3390/s23042003 |
| Language | English |