Calibrating a high-speed contact-resonance profilometer
Fahrbach M., Friedrich S., Cappella B., Peiner E.piezoresistive microprobes, AFM
Document type | Article |
Journal title / Source | Journal of Sensors and Sensor Systems |
Volume | 9 |
Issue | 2 |
Page numbers / Article number | 179-187 |
Publisher's name | Copernicus GmbH |
Publication date | 2020-7 |
ISSN | 2194-878X |
DOI | 10.5194/jsss-9-179-2020 |
Web URL | https://jsss.copernicus.org/articles/9/179/2020/#section11 |
Language | English |