Compact differential plane interferometer with in-axis mirror tilt detection
Rerucha S., Hola M., Sarbort M., Hrabina J., Oulehla J., Číp O., Lazar J.Laser interferometryOptical metrologyDimensional measurementCommon path interferometerDifferential interferometerTilt compensationLarge volume metrology
Document type | Article |
Journal title / Source | Optics and Lasers in Engineering |
Volume | 141 |
Page numbers / Article number | 106568 |
Publisher's name | Elsevier BV |
Publication date | 2021-6 |
ISSN | 0143-8166 |
DOI | 10.1016/j.optlaseng.2021.106568 |
Language | English |