Compact differential plane interferometer with in-axis mirror tilt detection

Rerucha S., Hola M., Sarbort M., Hrabina J., Oulehla J., Číp O., Lazar J.

Laser interferometryOptical metrologyDimensional measurementCommon path interferometerDifferential interferometerTilt compensationLarge volume metrology

Document type Article
Journal title / Source Optics and Lasers in Engineering
Volume 141
Page numbers / Article number 106568
Publisher's name Elsevier BV
Publication date 2021-6
ISSN 0143-8166
DOI 10.1016/j.optlaseng.2021.106568
Language English

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