Etching of silicon surfaces using atmospheric plasma jets
Paetzelt H., Böhm G., Arnold Th.plasma jet machining, plasma etching, surface roughness
| Document type | Article |
| Journal title / Source | Plasma Sources Science and Technology |
| Peer-reviewed article | 1 |
| Volume | 24 |
| Issue | 2 |
| Page numbers / Article number | 025002 |
| Publisher's name | IOP Publishing |
| Publisher's address (city only) | Bristol |
| Publication date | 2015-1-27 |
| DOI | 10.1088/0963-0252/24/2/025002 |
| Language | English |