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Etching of silicon surfaces using atmospheric plasma jets

Paetzelt H., Böhm G., Arnold Th.

plasma jet machining, plasma etching, surface roughness

Document type Article
Journal title / Source Plasma Sources Science and Technology
Peer-reviewed article 1
Volume 24
Issue 2
Page numbers / Article number 025002
Publisher's name IOP Publishing
Publisher's address (city only) Bristol
Publication date 2015-1-27
DOI 10.1088/0963-0252/24/2/025002
Language English

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Project title (JRP)
SIB03: kNOW Realisation of the awaited definition of the kilogram - resolving the discrepancies
Name of Call / Funding Programme
EMRP A169: Call 2011 SI Broader Scope