Estimation of the measurement uncertainty of LNE's metrological Atomic Force Microscope using virtual instrument modeling and Monte Carlo Method
Ceria P., Ducourtieux S., Boukellal Y.atomic force microscope, monte carlo method
| Document type | Proceedings |
| Journal title / Source | Proceedings of 17th International Congress of Metrology |
| Issue | 2015 |
| Page numbers / Article number | 14007 |
| Publisher's name | EDP Sciences |
| Publication date | 2015-9-21 |
| Conference name | 17th International Congress of Metrology |
| Conference date | September 21-24, 2015 |
| Conference place | Paris, France |
| DOI | 10.1051/metrology/20150014007 |
| Language | English |