Estimation of the measurement uncertainty of LNE's metrological Atomic Force Microscope using virtual instrument modeling and Monte Carlo Method
Ceria P., Ducourtieux S., Boukellal Y.atomic force microscope, monte carlo method
Document type | Proceedings |
Journal title / Source | Proceedings of 17th International Congress of Metrology |
Issue | 2015 |
Page numbers / Article number | 14007 |
Publisher's name | EDP Sciences |
Publication date | 2015-9-21 |
Conference name | 17th International Congress of Metrology |
Conference date | September 21-24, 2015 |
Conference place | Paris, France |
DOI | 10.1051/metrology/20150014007 |
Language | English |