Estimation of the measurement uncertainty of LNE's metrological Atomic Force Microscope using virtual instrument modeling and Monte Carlo Method

Ceria P., Ducourtieux S., Boukellal Y.
Keywords:

atomic force microscope, monte carlo method

Document type Proceedings
Journal title / Source Proceedings of 17th International Congress of Metrology
Issue 2015
Page numbers / Article number 14007
Publisher's name EDP Sciences
Publication date 2015-9-21
Conference name 17th International Congress of Metrology
Conference date September 21-24, 2015
Conference place Paris, France
DOI 10.1051/metrology/20150014007
Language English

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