Numerical investigations of the influence of different commonly applied approximations in scatterometry
Endres J., Burger S., Wurm M., Bodermann B.| Document type | Proceedings |
| Journal title / Source | Modeling Aspects in Optical Metrology IV |
| Peer-reviewed article | 1 |
| Volume | 8789 |
| Publication date | 2013-5-13 |
| Conference name | SPIE Modelling Aspects in Optical Metrology (World of Photonics Congress) |
| Conference date | 13.05. - 16.05.2013 |
| Conference place | Munich, Germany |
| DOI | 10.1117/12.2022108 |
| ISBN | 978-0-8194-9605-8 |
| Web URL | http://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=1687350 |