Electron Flood Gun Damage Effects in 3D Secondary Ion Mass Spectrometry Imaging of Organics
Havelund R., Seah M.P., Shard A.G., Gilmore I.S.Secondary ion mass spectrometry; depth profiling; argon cluster; damage; chemical metrology
| Document type | Article |
| Journal title / Source | Journal of the American Society of Mass Spectrometry |
| Peer-reviewed article | 1 |
| Volume | 25 |
| Issue | 9 |
| Page numbers / Article number | 1565-1571 |
| Publisher's name | ASMS |
| Publisher's address (city only) | Santa Fe USA |
| Publication date | 2014-9-25 |
| DOI | 10.1007/s13361-014-0929-5 |
| Web URL | http://link.springer.com/article/10.1007%2Fs13361-014-0929-5#page-2 |
| Language | English |