Electron Flood Gun Damage Effects in 3D Secondary Ion Mass Spectrometry Imaging of Organics
Havelund R., Seah M.P., Shard A.G., Gilmore I.S.Secondary ion mass spectrometry; depth profiling; argon cluster; damage; chemical metrology
Document type | Article |
Journal title / Source | Journal of the American Society of Mass Spectrometry |
Peer-reviewed article | 1 |
Volume | 25 |
Issue | 9 |
Page numbers / Article number | 1565-1571 |
Publisher's name | ASMS |
Publisher's address (city only) | Santa Fe USA |
Publication date | 2014-9-25 |
DOI | 10.1007/s13361-014-0929-5 |
Web URL | http://link.springer.com/article/10.1007%2Fs13361-014-0929-5#page-2 |
Language | English |