Effects of thermal drifts on the calibration of capacitive displacement probes at the nanometer level of accuracy
Bouderbala K, Nouira H, Girault M, Videcoq E, Salgado Jthermal behavior and drift, capacitive displacement probe, dimensional metrology, evaluation
| Document type | Article |
| Journal title / Source | Instrumentation and Measurement, IEEE Transactions |
| Volume | PP |
| Issue | 99 |
| Page numbers / Article number | 1 |
| Publisher's name | IEEE |
| Publication date | 2015-6-26 |
| ISSN | 0018-9456 |
| DOI | 10.1109/TIM.2015.2440563 |
| Language | English |