Effect of different ALD Al2O3 oxidants on the surface passivation of black silicon

Repo P., Savin H.

black silicon; surface passivatoin; aluminum oxide

Document type Article
Journal title / Source Energy Procedia
Peer-reviewed article 1
Volume 92
Issue -
Page numbers / Article number 381-385
Publisher's name Elsevier
Publisher's address (city only) -
Publication date 2016-8
DOI 10.1016/j.egypro.2016.07.116
Web URL http://www.sciencedirect.com/science/article/pii/S1876610216305434
Language English

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