Effect of different ALD Al2O3 oxidants on the surface passivation of black silicon
Repo P., Savin H.black silicon; surface passivatoin; aluminum oxide
Document type | Article |
Journal title / Source | Energy Procedia |
Peer-reviewed article | 1 |
Volume | 92 |
Issue | - |
Page numbers / Article number | 381-385 |
Publisher's name | Elsevier |
Publisher's address (city only) | - |
Publication date | 2016-8 |
DOI | 10.1016/j.egypro.2016.07.116 |
Web URL | http://www.sciencedirect.com/science/article/pii/S1876610216305434 |
Language | English |