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VNA Tools: Material Parameters Extraction from On-Wafer CPW S-Parameter Measurements

Eckmann B., Wollensack M., Ausden L., Hoffmann J., Zeier M.
Keywords:

Vector Network Analyzer, S-parameters, Material parameters, On-wafer, Measurement uncertainty, VNA Tools

Document type Proceedings
Journal title / Source
Publisher's name IEEE
Publisher's address (city only) Piscataway
Publication date 2026-1-1
Conference name 106th ARFTG Microwave Measurement Conference
Conference date 18-21 January 2026
Conference place Los Angeles, CA, USA
ISSN 2767-8776
DOI 10.5281/zenodo.19629109

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Information

Name of Call / Funding Programme
Metrology Partnership 2023: Industry