Modelling of the X,Y,Z positioning errors and uncertainty evaluation for the LNE's mAFM using the Monte Carlo method
Ducourtieux Sebastien, Ceria Paul, Boukellal Younes, Allard Alexandre, Fischer Nicolas, Feltin Nicolasatomic force microscope, metrology, virtual instrument, measurement uncertainty, Monte Carlo method, Morris design, Sobol indices
| Document type | Article |
| Journal title / Source | Measurement Science and Technology |
| Volume | 28 |
| Issue | 3 |
| Page numbers / Article number | 034007 |
| Publisher's name | IOP Publishing |
| Publisher's address (city only) | Temple Circus, Temple, Bristol, BS1 6BE, United Kingdom |
| Publication date | 2017-1-23 |
| ISSN | 0957-0233, 1361-6501 |
| DOI | 10.1088/1361-6501/28/3/034007 |
| Language | English |