Dual beam organic depth profiling using large argon cluster ion beams

Holzweber M., Shard A. G., Jungnickel H., Luch A., Unger W. E.S.

SIMS; organic depth profiling; argon cluster; ToF-SIMS; Ar-GCIB

Document type Proceedings
Journal title / Source Surface and Interface Analysis
Volume 46
Issue 10-11
Publication date 2014-3-18
Conference name European Applications of Surface and Interface Analysis - ECASIA'13
Conference date October 13-18, 2013
Conference place Sardinia
DOI 10.1002/sia.5429
Web URL http://onlinelibrary.wiley.com/doi/10.1002/sia.5429/abstract
Language English

Back to the list view