Dual beam organic depth profiling using large argon cluster ion beams
Holzweber M., Shard A. G., Jungnickel H., Luch A., Unger W. E.S.SIMS; organic depth profiling; argon cluster; ToF-SIMS; Ar-GCIB
| Document type | Proceedings |
| Journal title / Source | Surface and Interface Analysis |
| Volume | 46 |
| Issue | 10-11 |
| Publication date | 2014-3-18 |
| Conference name | European Applications of Surface and Interface Analysis - ECASIA'13 |
| Conference date | October 13-18, 2013 |
| Conference place | Sardinia |
| DOI | 10.1002/sia.5429 |
| Web URL | http://onlinelibrary.wiley.com/doi/10.1002/sia.5429/abstract |
| Language | English |