Dual beam organic depth profiling using large argon cluster ion beams
Holzweber M., Shard A. G., Jungnickel H., Luch A., Unger W. E.S.SIMS; organic depth profiling; argon cluster; ToF-SIMS; Ar-GCIB
Document type | Proceedings |
Journal title / Source | Surface and Interface Analysis |
Volume | 46 |
Issue | 10-11 |
Publication date | 2014-3-18 |
Conference name | European Applications of Surface and Interface Analysis - ECASIA'13 |
Conference date | October 13-18, 2013 |
Conference place | Sardinia |
DOI | 10.1002/sia.5429 |
Web URL | http://onlinelibrary.wiley.com/doi/10.1002/sia.5429/abstract |
Language | English |