Squeeze-Film Effect on Atomically Thin Resonators in the High-Pressure Limit
Dolleman R.J., Chakraborty D., Ladiges D.R., van der Zant H.S.J., Sader J.E., Steeneken P.G.graphene, nanoelectromechanical systems (NEMS), pressure sensor, gas damping
Document type | Article |
Journal title / Source | Nano Letters |
Volume | 21 |
Issue | 18 |
Page numbers / Article number | 7617-7624 |
Publisher's name | American Chemical Society (ACS) |
Publication date | 2021-8-30 |
ISSN | 1530-6984, 1530-6992 |
DOI | 10.1021/acs.nanolett.1c02237 |
Language | English |