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Squeeze-Film Effect on Atomically Thin Resonators in the High-Pressure Limit

Dolleman R.J., Chakraborty D., Ladiges D.R., van der Zant H.S.J., Sader J.E., Steeneken P.G.
Keywords:

graphene, nanoelectromechanical systems (NEMS), pressure sensor, gas damping

Document type Article
Journal title / Source Nano Letters
Volume 21
Issue 18
Page numbers / Article number 7617-7624
Publisher's name American Chemical Society (ACS)
Publication date 2021-8-30
ISSN 1530-6984, 1530-6992
DOI 10.1021/acs.nanolett.1c02237
Language English

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Information

Project title (JRP)
17FUN05: PhotOQuant: Photonic and Optomechanical Sensors for Nanoscaled and Quantum Thermometry
Name of Call / Funding Programme
EMPIR 2017: Fundamental