Direct structural characterisation of line gratings with grazing incidence small-angle x-ray scattering
Wernecke Jan, Scholze Frank, Krumrey Michael| Document type | Article |
| Journal title / Source | REVIEW OF SCIENTIFIC INSTRUMENTS |
| Peer-reviewed article | 1 |
| Volume | 83 |
| Publication date | 2012-10-17 |
| DOI | 10.1063/1.4758283 |
| Web URL | http://scitation.aip.org/content/aip/journal/rsi/83/10?ver=pdfcov |
| Language | English |