Development of a virtual instrument to improve the estimation of measurement uncertainty of a metrological atomic force microscope using Monte Carlo method
Ceria P., Ducourtieux S., Boukellal Y.metrological atomic force microscopy, virtual instrument, modelling, Monte Carlo method, measurement uncertainty
| Document type | Proceedings |
| Journal title / Source | Proceedings of euspen’s 15 th International Conference & Exhibition, Leuven, Belgium, June 2015 |
| Issue | 2015 |
| Page numbers / Article number | O3.3, p 107 |
| Publisher's name | Euspen |
| Publisher's address (city only) | Delft |
| Publication date | 2015-6 |
| Conference name | euspen’s 15 th International Conference & Exhibition |
| Conference date | June 1-5, 2015 |
| Conference place | Leuven, Belgium |
| ISBN | 978-0-9566790-7-9 |
| Language | English |